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Aktive vibration isolation

We have two stages: R1 & clock laser are on one stage and R2 is on another stage.

  • Manual: <hi #fff200>TODO</hi>
  • three modi available: aktive, transportable, off
  • Information on aktive modus: The stage works, if…
  1. First step: Complete load adjust with “up”-button
    • load adjust: on or off or locked
  2. Second step: Activate isolation with “down”-button
    • isolation on or off
Important in aktive modus: The “four bars” VS, HS, VA, HA should be in the upper third of the range for an adequate control range.
  • Information on transportable modus: Mechanic is decoupled. Now is working, for example optics screw down, possible.
  • Information on off modus: -

<hi #fff200>FOTOS</hi>

Movements in the room have influence of the vibration isolation!