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Aktive vibration isolation

We have two stages: R1 & clock laser are on one stage and R2 is on another stage.

  • Manual: <hi #fff200>TODO</hi>
  • three modi available: aktive, transportable, off
  • First step: Complete load adjust with “up”-button: load adjust: on or off or locked
  • Second step: Activate isolation:“down”-button: isolation on or off
  • Information on aktive modus: The stage works.
  • Information on transportable modus: Mechanic is decoupled. Now is working, for example optics screw down, possible.
  • Information on off modus: -

<hi #fff200>FOTOS</hi>

Important in aktive modus: The “four bars” VS, HS, VA, HA should be in the upper third of the range for an adequate control range.
Movements in the room have influence of the vibration isolation!