Aktive vibration isolation

We have two stages: R1 & clock laser are on one stage and R2 is on another stage.

three modi available: aktive, transportable, off

Information on aktive modus: The stage works, if…

First step: Complete load adjust with “up”-button

load adjust: on or off or locked

Second step: Activate isolation with “down”-button

isolation on or off

Important in aktive modus: The “four bars” VS, HS, VA, HA should be in the upper third of the range for an adequate control range.

Information on transportable modus: Mechanic is decoupled. Now is working, for example optics screw down, possible.

Information on off modus: -

Movements in the room have influence of the vibration isolation!

Manual and datasheet

flyer_halcyonics_micro_series_1_.pdf

operation_manual_halcyonics_micro_series_1_.pdf

tech_spec_halcyonics_micro_1_.pdf